Semiconductors
Semiconductors
- E84 Response EQ Load Port System
:
Using the OHT System (Overhead Hoist Transfer System) for process equipment that supports only manual ports, the vehicle moves along the rail installed on the ceiling in the clean room, and FOUP (FOSB, POD, Cassette, Magazine, etc) can be transported between manufacturing processes. An unmanned automatic conveyance system.
- Semiconductor Stocker : Inter-process material transport system with FOUP/FOSB storage and transport function.